High-speed scanning laser-induced breakdown spectroscopy at 1000 Hz with single pulse evaluation for the detection of inclusions in steel

Spatially resolved information about the distribution and chemical composition of inclusions in steel are gained by scanning methods, such as scanning electron microscopy with energy dispersive X-ray spectroscopy, electron probe microanalysis or capillary-X-ray flourescence. Scanning laser-induced breakdown spectroscopy (LIBS) offers distinct advantages in contrast to these conventional methods. Sample polishing or high vacuum conditions are not necessary, a simple grinding of the sample is sufficient for the preparation. Analysing times can be reduced significantly. At Fraunhofer ILT a measuring system was developed enabling for the first time high-speed scanning LIBS with measuring frequencies of up to 1000 Hz. Sample surfaces with dimensions up to 110×45 mm2 can be analyzed. Light elements such as C, N, O, P, and S are detected, which is demonstrated by the identification of nonmetallic inclusions in steel. Principle, features and results of high-speed scanning LIBS with a spatial resolution<20 μm are presented.