材料科学
基质（水族馆）
薄膜
溅射
溅射沉积
盐酸
蚀刻（微加工）
化学工程
光电子学
导电体
复合材料
纳米技术
冶金
图层（电子）
工程类
地质学
海洋学
作者
Jinsong Lei,Zou Yin-sheng
标识
DOI：10.1142/s0218625x1250014x
摘要
ZnO:Al (AZO) transparent conductive films used for solar cells were prepared by DC magnetron sputtering technology. The influence of substrate temperature on the electrical and optical properties of the films was studied. Further, the AZO films prepared were etched in diluted hydrochloric acid. The film surface morphology after etching for different time was researched.
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