Fabrication and characterization of Al/PMMA/Cr metal-insulator-metal diode

Metal-Insulator-Metal (MIM) diodes are a promising candidate for rectenna based energy harvesting application owing to its tunneling based ultra-fast conduction mechanism. A number of material combinations have been explored in quest of developing such high frequency devices. Recently, organic insulator based MIM diodes are also under investigation. In the present work an organic polymer poly(methyl methacrylate) (PMMA) has been used as insulating layer to fabricate an Al/PMMA/Cr MIM structure. The Al and Cr metal electrodes were thermally evaporated while PMMA was deposited by spin coating technique. Electrical behavior of the diode was measured. The as fabricated device exhibited current in the range of 40 μA at ±0.6 V of applied bias with acceptable non-linearity and asymmetry.