计量学
激光器
亮度
等离子体
光辉
半导体
半导体器件制造
材料科学
半导体激光器理论
光电子学
光源
计算机科学
光学
物理
量子力学
薄脆饼
作者
Hui‐Ling Zhu,Toru Fujinami,Xiaohua Ye,Don McDaniel,Deborah Gustafson
出处
期刊:SPIE eBooks
[SPIE]
日期:2023-09-19
标识
DOI:10.1117/3.2638242.ch12
摘要
This chapter provides detailed information on CW-laser-driven plasma light sources’ operational principles and performance characteristics, including spectral radiance (brightness), stability, and lifetime performance. We present several semiconductor manufacturing–related applications. We also briefly discuss application examples of LDP sources in addition to semiconductor metrology.
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