计量学
卷到卷处理
吞吐量
数码产品
印刷电子产品
计算机科学
质量(理念)
制造工程
纳米技术
系统工程
工程类
工艺工程
机械工程
材料科学
电气工程
电信
认识论
统计
哲学
数学
无线
作者
Kerry Maize,Ye Mi,Miko Cakmak,Ali Shakouri
标识
DOI:10.1002/admt.202200173
摘要
Abstract Roll‐to‐Roll (R2R) manufacturing is changing how state‐of‐the‐art technology is made. Roll‐to‐Roll is part of a family of advanced scalable inline manufacturing techniques that make traditional and state‐of‐the‐art products at high yield and reduced cost. R2R manufacturing has grown rapidly and is fundamental to several advanced technologies such as functional materials and films, sensors for medicine, biology, and environment monitoring, energy harvesting devices, and flexible electronics. Advantages of R2R manufacturing include ease of machine design, adaptability to a wide range of additive processing methods, and very high throughput. To keep up with advances in R2R manufacturing, novel methods have emerged to measure important product metrics (thickness, roughness, conductivity) and monitor quality (uniformity, defects) inline and in real‐time. This review provides an overview of the state‐of‐the‐art for real‐time inline metrology and quality control in modern R2R manufacturing. The survey considers both established inline metrology techniques such as line‐scan imaging and reflectometry, and techniques recently adapted or that show promise for real‐time inline R2R metrology such as ellipsometry, hyper‐spectral imaging, and Raman spectroscopy.
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