High-Q AlGaAs-on-insulator microresonators for spontaneous parametric down-conversion

Aluminum gallium arsenide (AlGaAs) is a promising photonic platform for photon-pair generation through spontaneous parametric down-conversion (SPDC) or spontaneous four-wave mixing due to its high optical nonlinearities. In this paper, we report our progress in the design and fabrication of high-quality-factor waveguide-coupled microring resonators in an AlGaAs-on-insulator (AlGaAsOI) platform using i-line (365 nm) photolithography. We design the waveguide geometries for the modal-phase matching for SPDC. Our preliminary results suggest the potential for efficient photon-pair generation in an AlGaAsOI platform for quantum photonic applications.