Wide-Input-Power Dynamic Range, 40-GHz Waveguide PIN Germanium Photodetector for Photonic Integrated Circuit

We fabricated waveguide germanium photodetectors (Ge-PDs) using silicon photonics technology at a commercial CMOS foundry. The fabricated Ge-PDs exhibited low dark current, high responsivity (1.1 A/W) and 40-GHz O/E response with TIA up to high input power of +5.8 dBm.