透射率
材料科学
红外线的
衰减系数
无定形固体
非晶硅
硅
红外光谱学
吸收(声学)
分析化学(期刊)
透射系数
传输(电信)
氧化物
光学
光电子学
复合材料
晶体硅
结晶学
化学
计算机科学
物理
电信
有机化学
冶金
作者
Shuo Wang,Xiaodan Zhang,Shanxin Xiong,Ying Zhao
出处
期刊:Chinese Physics B
[IOP Publishing]
日期:2014-09-01
卷期号:23 (9): 098801-098801
被引量:2
标识
DOI:10.1088/1674-1056/23/9/098801
摘要
An improved method of fitting point-by-point is proposed to determine the absorption coefficient from infrared (IR) transmittance. With no necessity of empirical correction factors, the absorption coefficient can be accurately determined for the films with thin thicknesses. Based on this method, the structural properties of the hydrogenated amorphous silicon oxide materials (a-SiOx:H) are investigated. The oxygen-concentration-dependent variation of the Si—O—Si and the Si—H related modes in a-SiOx:H materials is discussed in detail.
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