Research on performances of piezoresistive pressure sensor

Micro-pressure sensor is the beginning of the studies and one of practical devices in MEMS. It is simple and used widely . The piezoresistive pressure sensor based on the piezoresistive effect and Wheatstone bridge is introduced in this paper. The influence of size, thickness, shape and location of the film on sensitivity and linearity of the piezoresistive pressure sensor are analyzed too