Progress in piezoelectric MEMS ultrasonic transducers

MEMS ultrasonic transducers device(MUT) is a new type of ultrasonic transducer which is the use of microelectronics and micromachining technology to manufacture.Compared with conventional ultrasound transducer,the MUT has the advantage of small size,light weight,low cost,low power consumption,high reliability,flexible control of frequency,frequency bandwidth,high sensitivity and easy with the integrated circuit,and implement intelligent.MUT is one of the important research directions of the ultrasonic transducers.MUT research mainly includes two aspects of the piezoelectric MUT(PMUT) and the capacitive MUT(CMUT).This article provides an overview of the development process and research findings of the PMUT,and future research and application prospects of PMUT.