Spectroscopic ellipsometric study on dispersion of optical constants of Gd2O3 films

Electron-beam evaporated Gd2O3 films have been characterized by spectroscopic ellipsometry technique. The experimental ellipsometric data have been fitted with theoretical models to derive information on the sample structure and dispersion of the optical constants of bulk Gd2O3. Three different dispersion models, proposed so far for amorphous materials have been used for the calculation of the refractive-index dispersion and results obtained from these models have been compared.