Low-Pressure Thermal Sensor Based on Porous Anodic Aluminum Oxide

The paper presents the design features and technology of the formation of a low-pressure sensor, which is a heater deposited onto the surface of a porous aluminum-oxide membrane formed on aluminum foil. The structure is fully formed using inexpensive low temperature methods. It is shown that an increase in the porosity of the membrane region separating the heating element and the substrate makes it possible to effectively measure a pressure up to 2 × 10–2 Pa.