Microchip fabrication : a practical guide to semiconductor processing

The Semiconductor Industry International Technology Roadmap for Semiconductors Semiconductor Materials and Process Chemicals Manufacturing Wafers Overview of Wafer Fabrication 300mm wafer diameter processing Contamination Control Process Yields Nanotechnology Processes Oxidation Basic Patterning -- Surface Preparation to Exposure Basic Patterning -- Developing to Final Inspection Advanced Photolithography Processes Doping Deposition of Dielectrics and Semiconductor Layers Metalization: Wiring the Chip Composites Process and Device Evaluation The Business of Water Fabrication Green Processing Semiconductor Devices and Integrated Circuit Formation Nanotechnology Devices Integrated Circuit Types Packaging GLOSSARY