Wafer-Level Characterization of Silicon Nitride CWDM (De)Multiplexers Using Bayesian Inference

A cascaded Mach-Zehnder interferometer based filter for coarse wavelength (de)multiplexing (CWDM) at the O-band is fabricated and tested on a silicon nitride on SOI platform. We characterize the chip-to-chip performance variability of the filter devices on a wafer. Using the optical measurement data, we apply Bayesian inference methods to estimate the waveguide geometery parameters and also quantify the uncertainty of the estimates.