Ultra-low loss and fabrication tolerant silicon nitride (Si3N4) (de-)muxes for 1-μm CWDM optical interconnects

Low-loss, fabrication-tolerant Si 3 N 4 CWDM lattice filters and AWGs are demonstrated for 990 – 1065nm bottom-emitting VCSELs. Channel separation of 25 nm, XT < -35 dB and −20 dB are reported with temperature shift of 14.5 pm/°C.