Rapid Two‐Photon Polymerization of an Arbitrary 3D Microstructure with 3D Focal Field Engineering

Abstract Two‐photon polymerization is a powerful method for three‐dimensional (3D) precision nanofabrication. To facilitate the fabrication speed, for the first time, single‐exposure or single‐scan two‐photon polymerization of an arbitrary 3D microstructure with smaller or larger volume is demonstrated through focal field engineering. The constraints and the initial conditions of the Gerchberg–Saxton algorithm for the retrieval of the incident wavefront are adapted for the shape fidelity and the smoothness of the 3D focal field intensity distribution. As a result, a small 3D microstructure can be polymerized by a single exposure within 0.1 s, while a larger one can be formed by continuous polymerization of slices of the structure with one‐dimensional single scan with a speed of 6 µm s−1. The microlenses that generate vortex beams with different orbital angular momentums are polymerized to demonstrate the high fabrication precision. These pave the way for the rapid two‐photon polymerization of arbitrary 3D structures.