Dynamic MEMS-based linear (1D) diffusers for laser beam homogenizing and beam shaping

We present a dynamic laser beam shaper based on MEMS technology. We show a prototype of a dynamic diffuser made of single crystal silicon. A linearly deformable silicon micromembrane is used to diffuse a laser beam in one dimension. Resonance frequencies of the membrane can range from 1 kHz to 100 kHz. Diffusing angle can be tuned by adjusting the driving voltage. We measured a diffusing angle of 0.16° for an actuation voltage of 20 V.