Reliability acceleration model of stacked ZrO<inf>2</inf>-Al<inf>2</inf>O<inf>3</inf>-ZrO<inf>2</inf> MIM capacitor with cylinder type

An exact lifetime extrapolation models of ZrO ₂ -Al2O3-ZrO ₂ (ZAZ) stack capacitor with metal-insulator-metal (MIM) structure was studied in this paper. From the extensive long-term test result (~ 7.5 months) it was found that the power-law model is suitable as a exact lifetime extrapolation model for ZAZ dielectric reliability.