结晶学
材料科学
物理
溅射
Crystal(编程语言)
透射电子显微镜
分析化学(期刊)
薄膜
纳米技术
化学
色谱法
计算机科学
程序设计语言
作者
Kin Man Yu,Marvin L. Cohen,E. E. Häller,William L. Hansen,Amy W. K. Liu,I. C. Wu
出处
期刊:Physical review
[American Physical Society]
日期:1994-02-15
卷期号:49 (7): 5034-5037
被引量:506
标识
DOI:10.1103/physrevb.49.5034
摘要
We present strong experimental evidence suggesting that we have synthesized the \ensuremath{\beta}-${\mathrm{C}}_{3}$${\mathrm{N}}_{4}$ phase. This is a material predicted by theory to have bulk moduli comparable to diamond. Thin films containing small crystals were deposited on Si and Ge wafers by rf diode sputtering of a pure graphite target with pure ${\mathrm{N}}_{2}$. The crystal structure of these phases was investigated using x-ray and electron-beam diffractometry as well as transmission electron microscopy. Our results indicate that the \ensuremath{\beta}-${\mathrm{C}}_{3}$${\mathrm{N}}_{4}$ particles with typical dimensions of \ensuremath{\sim}0.5 \ensuremath{\mu}m are embedded in a 1-\ensuremath{\mu}m-thick layer of a C-N polymer. These particles are believed to crystallize preferentially on Si (100) wafers.
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