Junctionless FinFET-based Hydrogen Gas Sensors: A Comprehensive Review of Design, Performance, and Reliability

可靠性(半导体) 可靠性工程 环境科学 计算机科学 工艺工程 工程类 材料科学 法律工程学 核工程
作者
Deborah Roseline P,Kavitha V P
标识
DOI:10.1109/icosec67334.2025.11459781
摘要

This comprehensive analysis investigates current developments in junctionless FinFET-based hydrogen gas sensors, with an emphasis on design innovations, performance improvements, and reliability challenges. The research explores various methods, including ferroelectric gate stacks, negative capacitance integration, spacer-engineered SOI structures, and strained silicon designs. The study evaluates electrical characterization, sensitivity analysis, and reliability assessments across multiple studies, drawing attention to noise-dependent sensitivity and the impact of gate oxide on device reliability. This review offers a distinctive viewpoint on the present situation and potential future developments of junctionless FinFET-based hydrogen gas sensing technology by combining results from several study undertaking. The focus on junctionless FinFET architectures, a more recent development in gas sensing applications, is what makes this paper distinctive. The applicability of different sensor configurations for specific applications is evaluated, along with associated trade-offs. It provides a comparative analysis of several sensor architecture, such as JL, JLNC, MFIS/MFMIS, and SJL structures, assessing their suitability for particular use cases and performance attributes. The study examines simulation-based sensors, focusing on those that make use of Technology Computer-Aided Design (TCAD) tools. The identification and investigation of reliability challenges in nanoscale gas sensing, such as noise-related problems, aging effects, and gate-induced drain leakage (GIDL), is a major emphasis of this paper. The study investigates how different design factors and material selections affect the sensitivity, reaction time, selectivity, and long-term stability of sensors. For increased sensitivity in applications, the combination of Pt/Pd and SiO2 is given particular attention. This review provides engineers and researchers involved in the field of advanced gas-sensing technologies with a comprehensive understanding of the most recent advancements and potential research avenues in junctionless FinFET-based hydrogen gas sensors by combining insights from various research efforts.
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