Sensitivity characteristics of a wave height sensor based on a MEMS piezoresistive cantilever and waterproof film

Abstract This paper presents the frequency characteristics of a barometric pressure-sensing wave height sensor employing a MEMS piezoresistive cantilever and a micromesh waterproof film. The proposed sensor exhibited mechanical bandpass filter characteristics owing to air leakage around the cantilever and film. Consequently, high robustness can be achieved if the frequency is designed to match the wave range. We theoretically and experimentally verified that the frequency response is influenced by the film’s chamber volume and permeability constant. We demonstrated that the proposed frequency-response model helps design a waterproof wave height sensor using a cantilever-type differential pressure sensor.