Study on the co-phasing simulation and experimental of segmented mirror based on broadband light

At present, the co-phasing detection algorithms for segmented mirrors struggle to balance the measurement range and accuracy. This paper proposes a coarse co-phasing measurement method using the incoherent properties of a broadband (400–800 nm) light source combined with the incoherence of two semicircular diffraction patterns of visible light as a template to detect the piston error, and a narrowband algorithm for fine co-phasing measurement. The diversity factors between template patterns and actual diffraction patterns can be calculated by the cross-correlation algorithm. This proposed method addresses long measurement time caused by low target flow rate and is characterized by wide measurement range, high precision and high energy utilization. The method is theoretically researched and simulated and an experimental system which was constructed to verify the effectiveness of this method achieves 15 nm detection accuracy, and the measurement range using the proposed method can match the measurement range of the actuator.