材料科学
腐蚀
高功率脉冲磁控溅射
涂层
微观结构
溅射沉积
冶金
化学计量学
沉积(地质)
溅射
复合材料
薄膜
纳米技术
化学
沉积物
古生物学
有机化学
生物
作者
Nassima Jaghar,Mohamed Lahouij,Hicham Larhlimi,Olayinka Oluwatosin Abegunde,Youssef Samih,M. Makha,Jones Alami
出处
期刊:Journal of vacuum science & technology
[American Institute of Physics]
日期:2024-05-10
卷期号:42 (4)
被引量:2
摘要
During reactive sputtering of CrxNy, precise regulation of nitrogen gas is crucial to control the properties of the deposited coating. In the present work, we investigate the influence of nitrogen content on CrxNy characteristics, including morphology, crystalline structure, hardness, corrosion protection, and wear protection performances. Our findings reveal that the hexagonal Cr2N coatings, although slightly lower in hardness (19 GPa) compared to stoichiometric CrN, exhibit superior corrosion resistance with a protection efficiency of 82%, and a reduced sliding wear behavior at 1.35E-09 mm3/N/m. Conversely, stoichiometric CrN shows the highest hardness at 22.8 GPa. Using high-power impulsed magnetron sputtering as a deposition technique, we were able to design CrxNy protective coatings with desired microstructure and phase composition, enabling the production of performance-tailored CrxNy coatings suitable for a diverse range of applications.
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