Approach to Flexibile Thin Film Rechargeable Lithium Ion Battery

We fabricated flexible thin film lithium ion battery for the functional system requires bio-compatible design to human body. The thin film battery will be composed of each cell that consists of a cathode and an anode electrode separated by an electrolyte that enables ion transfer between the two electrodes. We used KAPTON film for the substrate to deposit current collector materials, copper, aluminum, and platinum with sputter deposition technique. The cathode and the anode were composed of Lithium cobalt oxide (LCO) and Li, respectively. Solid-state electrolyte, an amorphous lithium phosphorous oxynitride, was used to solve the safety issues that liquid electrolyte has. The Lipon layer was patterned by lift-off technique to control the area of the electrode-electrolyte interface.