材料科学
成核
凝聚态物理
部分位错
位错
外延
透射电子显微镜
极限抗拉强度
堆积
晶体孪晶
结晶学
超晶格
放松(心理学)
复合材料
微观结构
图层(电子)
纳米技术
光电子学
核磁共振
化学
心理学
社会心理学
物理
有机化学
出处
期刊:Journal of vacuum science & technology
[American Vacuum Society]
日期:1993-05-01
卷期号:11 (3): 1056-1063
被引量:31
摘要
The relaxation behavior of short-period Si/Ge superlattices and SixGe1−x alloy layers under compressive and tensile strain field is compared experimentally by means of transmission electron microscopy as well as theoretically on the basis of a half-loop dislocation nucleation model. It was found that misfit dislocations in tensily strained layers grown on Ge(001) substrates are imperfect and of the 90° Shockley type provided some critical misfit fc is exceeded. Subsequent nucleation and glide of these partial dislocations on adjacent {111} glide planes leads to the formation of stacking faults and microtwins. In the low misfit regime (f<fc), the nucleation of 60° perfect dislocations is energetically favorable. In contrast, misfit dislocations in layers which experience a compressive strain field within the (001) growth plane are generally of the 60° type. In this case the critical thickness for coherent growth is found to be substantially enlarged with respect to the inverse strain situation where microtwin formation occurs.
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