Simulations and experimental control of x-ray deformable mirror

An adjustable surface shape with a high accuracy attracts a significant interest in the development of X-ray optical elements. However, the optical parameters of the conventional polished mirror are fixed, lacking adaptability and leading to significantly limited application targets. Based on adaptive optics technology, the X-ray deformable mirror can be achieved using the bending principle of a piezoelectric bimorph. In this study, we developed an X-ray lead-zirconate-titanate-(PZT) deformable mirror with an adjustable surface shape. The X-ray deformable mirror was simulated and optimized using the ANSYS software to ensure the feasibility of the design scheme. An X-ray deformable mirror prototype was manufactured based on the simulation results. It had a simple structure consisting of a 400-μmthick D263 glass substrate and 500-μm-thick PZT thin sheet. The PZT thin sheet consisted of 11 element electrode actuators. We used a ZYGO interferometer for an on-line surface shape feedback of the X-ray deformable mirror. By changing the voltage loads of the actuators, the glass substrate surface shape could be adjusted, and a target cylinder with a radius of curvature of 30 m was obtained. The curvature radius of the target cylinder could be changed, from 5 m to infinity.