Monitoring of Ground Deformation with InSAR is one of the most advanced research topics for remote sensing study nowadays in the world,which can be improved by PS InSAR.The factors restricting the application of InSAR in monitoring of ground deformation is analysed,the basic principles and key technologies of data processing in PS InSAR is introduced,and its developmental tendency based on the present application of PS InSAR home and abroad is forecasted.