Improved gas-jet based extreme ultraviolet, soft X-ray laser plasma source

We present a new nozzle design for an improved brilliance of laser-produced gas plasmas emitting in the soft X-ray and extreme ultraviolet spectral regime. A rotationally asymmetric gas jet is formed by employing two closely adjacent nozzles facing each other under the angle of 45°. The generated three-dimensional gas density distribution is tomographically analyzed using a Hartmann-Shack wavefront sensor. A comparison with numerical simulations accomplishes an optimization of the nozzle arrangement. The colliding gas jets create an optimized gas distribution with increased density, leading to a significant brilliance enhancement of the extreme ultraviolet, soft X-ray plasma.