Atomic Layer Deposition for Thin‐Film Lithium‐Ion Batteries

This chapter gives an overview of the status and possibilities in application of atomic layer deposition (ALD) for advancement of lithium-ion batteries. Stabilization or prevention of solid electrolyte interface (SEI) layers through ALD coating has been demonstrated with great success in many cases. One method to increase the power capability of the passivated layer is to use a solid-state Li-ion conducting material as the passivated layer. In order to realize deposition of Li-ion conducting materials by ALD, a suitable Li-containing precursor is required. The development of consumer electronics has now come so far that further advancement requires specialized energy sources. A necessity for realizing 3D all-solid-state batteries is a deposition process for a good solid-state electrolyte. A range of different cathode materials have been deposited by ALD. The examples for deposition of anode materials by ALD are more limited and mainly relate to titanates and conversion materials.