栅栏
闪耀光栅
光学
导波测试
衍射光栅
材料科学
蚀刻（微加工）
导模共振
光电子学
联轴节（管道）
衍射效率
物理
纳米技术
图层（电子）
冶金
作者
Takashi Aoyagi,Yoshinobu Aoyagi,Susumu Namba
摘要
High-efficiency blazed grating couplers have been successfully realized by using an ion etching technique. We observed that a guided wave was radiated as the leaky wave which appears selectively either above or below the grating depending on the direction of the propagation of the guided wave. The coupling efficiency from the guided wave into one of the leaky waves was about 97% at the blaze angle of 30°.
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(2025-6-4)
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