Mass Spectrometric Study of the Gas Phase During Chemical Vapor Deposition of Pyrolytic Carbon

Abstract. The pyrolysis of C h. of C31 & and of the mixture 20C&/80CH., was investigated in a hot wall CVD reactor by mass spectrometry. Experiments were conducted as a function of temperature and of surface-to-volume ( S N) ratio of the substrate. The main by-products of the pyrolysis were identified and reaction mechanisms were proposed taking into account homogenous decomposition/formation reactions. Cyclic species are possibly involved in the formation mechanism of pyrocarbon. 1.