A principle of charge compensation approach for comparator offset control is analyzed. A dynamic offset control technique that employs charge compensation by timing control is proposed for comparator design in scaled CMOS technology. The analysis has been verified by fabricating a 65 nm CMOS 1.2 V 1 GHz comparator that occupies 25 times 65 mum2and consumes 380 muW. Circuits for offset control occupies 21% of the areas and 12% of the power consumption of the whole comparator chip.