Hybrid Cyan Nitride/Red Phosphors White Light-Emitting Diodes With Micro-Hole Structures

Hybrid white light emitting diodes (LEDs) have been developed utilizing micro-LEDs radiatively pumping down-conversion phosphor materials. The cyan InGaN/GaN multiple quantum wells LEDs with 95 μm in square are fabricated into 4 × 4 pixels as one unit in 4 in wafer by photolithography and inductively coupled plasma etching techniques. The relatively low turn on voltage and low leakage of cyan micro-LEDs indicate good electrical performance. A significant reduction in the efficiency droop characteristics of cyan micro-LED has been observed in comparison with that of standard green LED. Finally, based on a systemic optimization for white emission indexes, high-quality hybrid white light emission has been demonstrated by the combination of blue and cyan micro-LEDs with two types of phosphors, which have a high color rendering index up to 87 at the correlated color temperatures of 6500 K. It also demonstrates a way to adjust the color component by modifying the output power of cyan micro-LED in hybrid LED, showing a promising candidate in a large range of applications including micro-displays, bioinstrumentation, photolithography, and lab-on-chip systems in the future.