材料科学
光探测
光电子学
响应度
超晶格
比探测率
探测器
微尺度化学
制作
光电探测器
光热治疗
热光电伏打
基质(水族馆)
吸收(声学)
热电效应
整改
热电冷却
红外线的
热辐射计
光学
纳米技术
微测辐射热计
红外探测器
能量转换效率
太赫兹辐射
纳米尺度
粒子探测器
热的
锑化镓
生物光子学
热电材料
能量转换
光散射
级联
纳米光子学
微电子
作者
Sheng Qiang,Mingxin Zhang,Jintao Wang,Bingxuan Zhu,Linqing Yue,Xu Pan,Zhao Lei,Ruo‐Yao Sun,Pei‐Yu Huang,Qian Zhang,Wen-Bo Duan,Mingyu Li,Liang Zhen,Jing‐Kai Qin,Cheng‐Yan Xu
摘要
ABSTRACT Photothermoelectric (PTE) detectors, which operate relying on the photothermal and thermoelectric effects, can overcome the intrinsic spectral limitations originated from material bandgaps in photon‐driven detectors. However, the hardware implementation of devices leveraging light‐heat‐electricity cascade conversion remains challenging. Here, we report the construction of MoS 2 /SiO 2 semiconductor/dielectric superlattice films with features of nanoscale layer definition, high crystalline quality, and wafer‐level manufacturability. Benefiting from the interlayer interference and electric‐field localization, the MoS 2 /SiO 2 superlattices exhibit remarkably enhanced optical absorption across the visible to infrared spectrum, which enables the high photothermal energy conversion efficiency and substantial temperature rise exceeding 70 K. The PTE detection, implemented by integrating superlattice absorber with a microscale thermoelectric (μ‐TE) platform based on Bi 2 Te 3 /Sb 2 Te 3 P–N pairs, enables high‐efficiency photodetection through strong light–matter interaction and optimized thermal management. The self‐powered detector can stably operate over a broad‐spectrum range extending to 1550 nm, demonstrating a temporal response (∼16 ms), high responsivity (17.6 V W −1 ), and detectivity exceeding 1.20 × 10 10 Jones, comparable to state‐of‐the‐art broadband PTE detectors. Array‐level integration facilitates high‐fidelity 1550 nm imaging with a 256‐pixel prototype, while wafer‐scale fabrication of over 3000 units on a 2‐inch substrate confirms excellent uniformity, reproducibility and scalability, unlocking the potential for advanced large‐scale imaging applications.
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