Review on the Nonlinear Modeling of Hysteresis in Piezoelectric Ceramic Actuators

Piezoelectric ceramic actuators have the advantages of fast response speed and high positioning accuracy and are widely used in micro-machinery, aerospace, precision machining machinery, and other precision positioning fields. However, hysteretic nonlinearity has a great influence on the positioning accuracy of piezoelectric ceramic actuators, so it is necessary to establish a hysteretic model to solve this problem. In this paper, the principles of the Preisach model, the Prandtl Ishilinskii (PI) model, the Maxwell model, the Duhem model, the Bouc–Wen model, and the Hammerstein model and their application and development in piezoelectric hysteresis modeling are described in detail. At the same time, the classical model, the asymmetric model and the rate-dependent model of these models are described in detail, and the application of the inverse model corresponding to these models in the feedforward compensation is explained in detail. At the end of the paper, the methods of inverse model acquisition and control frequency of these models are compared. In addition, the future research trend of the hysteresis model is also prospected. The ideas and suggestions highlighted in this paper will guide the development of piezoelectric hysteresis models.