Scaled contact length with low contact resistance in monolayer 2D channel transistors

Two-dimensional transition metal dichalcogenides (2D TMDs) are expected to enable extremely scaled logic transistors for their ultrathin body and superior electrostatic control, i.e. gate length scaling. Aggressive scaling requires also contact length scaling. Here we demonstrate contact length scaling with low contact resistance of sub-100 Ω-μm (best data in TLM) through optimized surface preparation and semimetal/metal stack. Monolayer-MoS 2 channel transistors have the same driving current at contact length down to 30 nm. A calibrated TCAD model which captured device trends is used to extrapolate to ~250 Ω-μm at sub-15nm contact length per nanosheet of MoS 2 .