25.2: Invited Paper: MicroLED Metrology: Challenges and Solutions

Manufacturing tolerances of color and luminance in µLED production can be rather high compared to standard display technologies. The resulting spectral variations in peak wavelength and bandwidth can affect the accuracy of imaging light measurement devices (ILMD). We address these challenges and provide experimental validation of an enhanced calibration concept, where the accuracy of a spectroradiometer is transferred to a coupled imaging RGB‐camera colorimeter, taking into account possible spectral variations of µLEDs. We validate the concept by comparing such imaging colorimeter measurements of a µLED array to sequential spectrally resolved spot measurements of the individual µLEDs of the array.