Self-Developing Characteristics of Nitrocellulose Exposed to Ion Beams

The self-developing and processing properties of nitrocellulose are investigated in comparison with other resists such as PMMA and PBS. It is found that only the nitrocellulose has the self-developing feature of the three resists, and that the self-developing rate of the nitrocellulose is independent of the polymerization grade of nitrocellulose, but is dependent on the nitrogen content in the nitrocellulose.