Flexible, Transparent, Active-Matrix Tactile Sensor Interface Enabled by Solution-Processed Oxide TFTs

Flexible tactile sensors with large area and high spatial resolution are important for emerging applications in electronic skin, health monitoring, and human-machine interfaces. However, achieving flexible tactile sensor arrays with low cost, low crosstalk, high sensitivity, and high uniformity characteristics remains challenging. In this work, we demonstrate a flexible, transparent, active-matrix (AM) tactile sensor array (TSA) by monolithically integrating solution-processed indium oxide (In 2 O 3 ) thin-film transistor (TFT) array with a highly pressure-sensitive micro-pyramidal film. The integrated TFT-resistive sensor (1T-1R) cell exhibits high sensitivity (29.9 kPa $^{-1})$, fast response/recovery time (21/16 ms), and robust mechanical flexibility with a bending radius of 3 mm. Furthermore, the In 2 O 3 TFTs exhibit excellent uniformity by process optimization, enabling the construction of a prototypical $10 \times 10$ AM-TSA for user-interactive sensor interfaces, such as monitoring external pressure distribution and playing the Tetris game in a wearable and wireless manner.