High-Performance Field-Effect Sensing of Ammonia Based on High-Density and Ultrathin Silicon Nanowire Channels

Ultrathin silicon nanowires (SiNWs), grown via a high-yield and low-cost catalytic approach, are ideal building blocks for the construction of highly sensitive field-effect transistor (FET) sensors. In this work, we demonstrate a high-density growth integration of an ultrathin SiNW array, with diameter down to