A16 Angstrom-Class CMOS Technology Featuring Enhanced Nanosheet Transistors with Super Power Rail (Backside Direct Contact Power Delivery) for AI and HPC Applications

We successfully developed and qualified A16 platform technology, industry-first angstrom-class CMOS technology platform featuring Super Power Rail (SPR). TSMC's SPR is an innovative backside power delivery solution incorporating a novel backside direct contact scheme that preserves N2P gate density and NanoFlex design-technology co-optimization for maximum product design benefits (Fig.1). Compared with N2P (performance-enhanced N 2), A16 provides a further$8 \% \sim 10 \%$faster speed at power, or$15 \% \sim 20 \%$power improvement and additional$8 \% \sim 10 \%$chip density gain. A16 is most suitable for AI/HPC products with complex signal routes and dense power delivery network. Mass production is slated for Q4'26.