Thickness Dependence of Optical and Electrical Properties of Cu Film

Cu films were prepared at room temperature by DC magnetron sputtering of Cu targets.The optical transmittance and the sheet resistance of Cu films with different thickness were measured.The experimental results showed that the transmittance and the sheet resistance decreased with increase of the thickness of Cu films.The transmittance reached to the peak at the 580 nm wavelength.The transmittance of Cu films depending on the thickness of Cu films or the wavelength of incident light was simulated.The theoretic result was consistent with the experimental data very well.