Langmuir double-probe diagnostics of electronic density in Ne glow discharge plasma

Based on the theory of Langmuir double-probe diagnostics,parameters of Ne glow discharge plasma in quartz discharge tube are measured.Electron temperature and electron density are calculated according to the double-probe Ⅰ/Ⅴ characteristic curve,and the variations of electron temperature and electron density are analyzed as a function of macroscopic parameters.The probe with a diameter of 0.1 mm is applied to diagnose plasma in the experiment.The probe measurement not only weakens the disturbance of plasma,but also reduces the error resulting from the usage of double-probe Ⅰ/Ⅴ characteristic curve.