Inertia-friction based 4 D.O.F. microactuator driven by PZT

WT5BZ]An inertia friction based 4 D.O.F microactuator driven by PZT is presented. The 4 D.O.F microactuator prototype made based on an experiment and its kinematic characteristics are discussed. The experiment proves that it is feasible to apply the driving principle to the microactuator. The microactuator is linear and controllable at the frequency between 0 to 3000 Hz of voltage. The existing design problems and the future research on the microactuator are discussed as well.[WT5HZ]