Development and application of LIGA technology

A series of LIGA(lithographie,galvanoformung and abformung)technologies are introduced,such as conventional LIGA,like?鄄LIGA,SLIGA(sacrificial LIGA),M2LIGA(moving mask LIGA)and resist?鄄reflow?鄄LIGA(PRLIGA——photoresist reflow LIGA). To meet the development of MEMS,a variety of microstructures with high?鄄aspect ratio are made easily with these LIGA technologies——micro?鄄point array,spherical surface and moving parts. Finally the authors put forward some disadvantages about these technologies.