Influence of oxidization temperature on Zn(O,S) films deposited by electron beam evaporation

Zn(O,S) films were fabricated by oxidizing ZnS thin films deposited by electron beam evaporation method onto glass substrates at temperatures of 350–500℃ for 2 h in an atmosphere of oxygen. The XRD and EDX confirmed that the Zn(O,S) films were obtained successfully. The influence of the oxidization temperature on the optical and electrical properties of the Zn(O,S) thin films was investigated. The experimental results show that the Zn(O,S) thin film oxidized at the temperature of 400℃ exhibits better properties than others, with the transmittance of 86% in the visible region, the band gap energy of 3.36 eV and the resistivity of 3.22 × 10 3 Ω·cm, which makes it a potential buffer layer of solar cell.