A composite structure pressure sensor based on quartz DETF resonator

Resonant pressure sensors are widely used in petrochemical, aerospace, biomedical and other fields due to their advantages of high resolution, precision and anti-interference ability. In this paper, we report a composite structure pressure sensor based on a quartz resonator. The sensor consists of a silicon film and a quartz tuning fork, forming a membrane-island-beam structure. The sensitivity factor of our sensor is 35.6 mHz/Pa in the operating range of 0–240 kPa at room temperature. The bias stability of the sensor is 72 ppb at 0.1 s. The nominal theoretical resolution of our sensor was 66 mPa. Testing results show a nonlinearity of 0.83% FS, a hysteresis of 0.79% FS, and a repeatability of 0.76% FS. The temperature coefficient of the sensor is 93.6 Hz/℃, and the sensitivity factor of the pressure sensor after temperature compensation is 44.96 mHz/Pa.