Formation of all-silica sculptured thin films based optical elements on crystal substrates

Optical components are the main parts in laser systems and also the limiting factor for high power laser. All-silica based optical components proved to have extremely high laser induced damage threshold and were already tested on standard glass substrates. Such coatings are fabricated by employing glancing angle deposition method, combination of nanostructured porous low refractive index and dense high refractive index thin films were fabricated. Anti-reflection coatings and mirrors with required reflection were achieved, which have superior LIDT values (50.7 J/cm²). Antireflection coating was deposited directly on BBO crystal and results are demonstrated. In this work, the possibility to improve microlaser systems with all-silica coatings is presented.