Wear resistance of Ti-implanted H13 steel using covering implantation technology

Ti and C ions extracted from a metal vapor vacuum arc ion source were implanted into H13 steel, with an implantation dose of 3×1017cm-2,an extractio n acceleration 48kV,and an average ion beam flux between 20 and 47μAcm-2. Rutherf ord backscattering (RBS) spectrum was used to measure the Ti concentration depth profile in H13 steel after Ti ion implantation. The surface microstructure observation was carried out using glancing xray diffraction analysis(GXRD). Wear test results showed that the wear rate of the implanted layer dropped by about 40% for Ti ，C dual implantation. In addition, the Ti implantation was found to significant ly reduce the friction coefficient of steel H13. The wear mechanisms of the impl anted layer were discussed by results of RBS and GXRD.