Highly Sensitive Porous PDMS-Based Capacitive Pressure Sensors Fabricated on Fabric Platform for Wearable Applications

聚二甲基硅氧烷 材料科学 电介质 多孔性 复合材料 电容 压力传感器 电容感应 电极 弹性体 制作 固化(化学) 光电子学 化学 电气工程 物理 工程类 病理 物理化学 热力学 医学 替代医学
作者
S. Masihi,Masoud Shariat Panahi,Dinesh Maddipatla,Anthony J. Hanson,A. K. Bose,S. Hajian,V. Palaniappan,Binu B. Narakathu,Bradley J. Bazuin,Massood Z. Atashbar
出处
期刊:ACS Sensors [American Chemical Society]
卷期号:6 (3): 938-949 被引量:173
标识
DOI:10.1021/acssensors.0c02122
摘要

A novel porous polydimethylsiloxane (PDMS)-based capacitive pressure sensor was fabricated by optimizing the dielectric layer porosity for wide-range pressure sensing applications in the sports field. The pressure sensor consists of a porous PDMS dielectric layer and two fabric-based conductive electrodes. The porous PDMS dielectric layer was fabricated by introducing nitric acid (HNO3) into a mixture of PDMS and sodium hydrogen bicarbonate (NaHCO3) to facilitate the liberation of carbon dioxide (CO2) gas, which induces the creation of porous microstructures within the PDMS dielectric layer. Nine different pressure sensors (PS1, PS2,..., PS9) were fabricated in which the porosity (pore size, thickness) and dielectric constant of the PDMS dielectric layers were varied by changing the curing temperature, the mixing proportions of the HNO3/PDMS concentration, and the PDMS mixing ratio. The response of the fabricated pressure sensors was investigated for the applied pressures ranging from 0 to 1000 kPa. A relative capacitance change of ∼100, ∼323, and ∼485% was obtained by increasing the curing temperature from 110 to 140 to 170 °C, respectively. Similarly, a relative capacitance change of ∼170, ∼282, and ∼323% was obtained by increasing the HNO3/PDMS concentration from 10 to 15 to 20%, respectively. In addition, a relative capacitance change of ∼94, ∼323, and ∼460% was obtained by increasing the PDMS elastomer base/curing agent ratio from 5:1 to 10:1 to 15:1, respectively. PS9 exhibited the highest sensitivity over a wide pressure sensing range (low-pressure ranges (<50 Pa), 0.3 kPa–1; high-pressure ranges (0.2–1 MPa), 3.2 MPa–1). From the results, it was observed that the pressure sensors with dielectric layers prepared at relatively higher curing temperatures, higher HNO3 concentrations, and higher PDMS ratios resulted in increased porosity and provided the highest sensitivity. As an application demonstrator, a wearable fit cap was developed using an array of 16 pressure sensors for measuring and mapping the applied pressures on a player's head while wearing a helmet. The pressure mapping aids in observing and understanding the proper fit of the helmet in sports applications.
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